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Data Analysis and Integration

Data Analysis and Integration is a very wide field in the semiconductor manufacturing business, on this site we limit ourselves to yield and quality related data (still this is a really huge topic). A possible enumeration of items could look like:

Statistic and advanced process control (APC) software.
- Statistic Process Control (SPC)
- Run to Run Control (R2R)
- Fault Detection and Classification (FDC)
Engineering database for inline, parametric and bin data.
Manufacturing execution system software (MES).
Automation of tools for dynamic recipe download and passive data collection.
Automated yield monitoring and analysis systems.
Inline defect measurement and analysis.

These activities need to be closely coordinated and supervised to ensure high yield and quality for the products, this task is usually carried out by a group called Yield Management or ...

Of course you cannot expect a small site like this to cover all the issues given above, but step by step you can find here some informations or utilities and ideas related to certain aspects ...

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